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Somsak (Tony) Teerawattanasook

Somsak (Tony) Teerawattanasook

Laser Plasma Laboratory
http://lpl.creol.ucf.edu/

Email

somsak2000@gmail.com (Personal)
steerawa@knights.ucf.edu (Work)

Phone

407-267-6240 (Cell)
407-823-6909 (Office)

Locations

CREOL 141A (Office)

Biography


Recent Publications

2007
Simi George, Jose Cunado, Somsak (Tony) Teerawattanasook, Robert Bernath, Christopher Brown, Kazutoshi Takenoshita, Chiew-Seng Koay, Martin Richardson
"High repetition-rate LPP-source facility for EUVL"
Proceedings of SPIE, Advanced lithographyvolume 6517, 2007
2006
Tobias Schmid, Kazutoshi Takenoshita, Simi George, Somsak (Tony) Teerawattanasook, Martin Richardson
"Debris mitigation for high-NA laser plasma EUV sources"
SPIE 31st International Symposium on MICROLITHOGRAPHY (San Jose, CA, USA), February 2006
2006
Kazutoshi Takenoshita, Chiew-Seng Koay, Simi George, Tobias Schmid, Somsak (Tony) Teerawattanasook, Martin Richardson
"Ion flux and collector mirror erosion study for microscopic laser-plasma tin-doped droplet EUV sources"
SPIE 31st International Symposium on MICROLITHOGRAPHY (San Jose, CA, USA), February 2006
2005
Kazutoshi Takenoshita, Chiew-Seng Koay, Somsak (Tony) Teerawattanasook, D. Malocha, Martin Richardson
"Debris characterization and mitigation from microscopic laser-plasma tin-doped droplet EUV sources"
Proceedings of SPIE, Emerging Lithographic Technologies IX, SPIE (San Jose, CA, USA, 2005) volume 5751-64, 1-3 March
2005
Kazutoshi Takenoshita, Chiew-Seng Koay, Somsak (Tony) Teerawattanasook, Martin C. Richardson
"Debris characterization and mitigation from microscopic laser-plasma tin-doped droplet EUV sources"
Proceedings of SPIE, volume 5751
2005
Kazutoshi Takenoshita, Chiew-Seng Koay, Somsak (Tony) Teerawattanasook, Martin Richardson
"Debris characterization and mitigation from microscopic laser-plasma tin-doped droplet EUV sources"
Proceedings of SPIEvolume 5751, 2005
2005
Martin C. Richardson, Chiew-Seng Koay, Kazutoshi Takenoshita, Christian Keyser, Robert Bernath, Simi A. George, Somsak (Tony) Teerawattanasook
"Diagnostics for laser plasma EUV sources"
Proceedings of SPIE, volume 5580, pages 434-442
2005
Martin Richardson, Chiew-Seng Koay, Kazutoshi Takenoshita, Christian Keyser, Robert Bernath, Simi George, Somsak (Tony) Teerawattanasook
"Diagnostics for laser plasma EUV sources"
Proceedings of SPIEvolume 5580, pages 434-442, 2005
2005
Kazutoshi Takenoshita, Chiew-Seng Koay, Simi A. George, Somsak (Tony) Teerawattanasook, Martin C. Richardson
"Ion emission measurements and mirror erosion studies for extreme ultraviolet lithography"
Journal of Vacuum Science and Technology B, volume 23, number 6, pages 2879-2884
2004
Kazutoshi Takenoshita, Chiew-Seng Koay, Somsak (Tony) Teerawattanasook, Martin Richardson
"Debris studies for the tin-based droplet laser-plasma EUV source"
SPIE Microlithography Symposium (Santa Clara, CA) 22-27 February 2004
more...

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