CREOL | The College of Optics & Photonics
Dr.  William Silfvast

Dr. William Silfvast

Emeritus Professor of Optics

Laser Plasma Laboratory

Email (Work)



CREOL A115 (Office)


William Silfvast received his PhD in Physics form the University of Utah and is currently Emeritus Professor of Optics at UCF. His current interests involve developing efficient short-wavelength sources and their use in new applications, such as soft-X-ray projection lithography and microscopy, and in photoionization spectroscopy. Dr. Silfvast is a Fellow of the American Physical Society, the Optical Society of America, and the IEEE. He has written a book entitled "Laser Fundamentals" published by Cambridge University Press.

Awards & Honors

Fellow of IEEE
Fellow of Optical Society of America
Fellow of the American Physical Society
2000 Distinguished Researcher of the Year at UCF
2000 Emertus Professor of Optics
1999 NATO Postdoctoral Fellowship at Oxford University 1999-2003
1983 Distinguished Member of the Technical Staff, AT&T Bell Labs
1982 Guggenheim Fellowship at Stanford University 1966-67

Recent Publications

William T. Silfvast
"Laser Fundamentals"
Cambridge University Press, 2nd ed.
Kazutoshi Takenoshita, Simi George, Chiew-Seng Koay, Jose Cunado, Robert Bernath, Christopher Brown, Moza Al-Rabban, William Silfvast, Martin Richardson
"Characterization of the Tin-doped droplet laser plasma EUV soruces for HVM"
Proceedings of SPIE, Advanced lithographyvolume 6517, 2007
Simi A. George, William T. Silfvast, Kazutoshi Takenoshita, Robert Bernath, Chiew-Seng Koay, Gregory Shimkaveg, Martin C. Richardson, Moza Mohammad Al-Rabban, H. Scott
"EUV Generation from Lithium Laser Plasma for Lithography"
Proceedings of SPIE, Advanced lithography, volume 6151
Simi George, Moza Al-Rabban, Kazutoshi Takenoshita, William Silfvast, Gregory Shimkaveg, Martin Richardson
"Out-of-band Spectroscopy of the Tin Droplet Target"
5th International Symposium on EUV Lithography, Barcelona, Spain
Silfvast, W. T.
"The amazing cadmium atom"
Ieee Journal of Selected Topics in Quantum Electronics. 6(6) 1400-1407
Klosner, M. A.; Silfvast, W. T.
"Xenon-emission-spectra identification in the 5-20-nm spectral region in highly ionized xenon capillary-discharge plasmas"
Journal of the Optical Society of America B-Optical Physics. 17(7) 1279-1290
Howard Bender
"Analysis of the operation and plasma dynamics of extreme-ultraviolet and soft x-ray lasers"
PhD Dissertation, CREOL, The College of Optics and Photonics
Marc Klosner
"Intense capillary discharge plasma extreme-ultraviolet sources for EUV lithography and other EUV imaging applications"
PhD Dissertation, CREOL, The College of Optics and Photonics

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