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Found 53 publications. Page 1 of 3 << Previous Page | Next Page >> 
Journal Papers (refereed)
2007
Kazutoshi Takenoshita, Simi George, Chiew-Seng Koay, Jose Cunado, Robert Bernath, Christopher Brown, Moza Al-Rabban, William Silfvast, Martin Richardson
"Characterization of the Tin-doped droplet laser plasma EUV soruces for HVM"
Proceedings of SPIE, Advanced lithographyvolume 6517, 2007
2007
Simi George, Jose Cunado, Somsak (Tony) Teerawattanasook, Robert Bernath, Christopher Brown, Kazutoshi Takenoshita, Chiew-Seng Koay, Martin Richardson
"High repetition-rate LPP-source facility for EUVL"
Proceedings of SPIE, Advanced lithographyvolume 6517, 2007
2005
Martin Richardson, Chiew-Seng Koay, Kazutosji Takenoshita, Simi George, Robert Bernath, Moza Al-Rabban
"Efficient 13.5 nm EUV generation from a laser plasma"
Quantum Electronics and Laser Science Conference (QELS)volume 3, pages 1947- 1949 , May 2005
2005
Simi George, Chiew-Seng Koay, Kazutoshi Takenoshita, Robert Bernath, Moza Al-Rabban, Christian Keyser, H. Scott, Martin Richardson
"EUV spectroscopy of mass-limited Sn-doped laser micro-plasmas"
Proceedings of SPIEvolume 5751, 2005
2005
Chiew-Seng Koay, Simi George, Kazutoshi Takenoshita, Robert Bernath, Etsuo Fujiwara, Martin Richardson
"High conversion efficiency microscopic tin-doped droplet target laser-plasma source for EUVL"
Proceedings of SPIEvolume 5751, 2005
2002
Keyser, C.; Bernath, R.; Al-Rabban, M.; Richardson, M.
"Dynamics of mass-limited laser plasma targets as sources for extreme ultraviolet lithography"
Japanese Journal of Applied Physics Part 1-Regular Papers Short Notes & Review Papers. 41(6B) 4070-4073
Conference Proceedings
2008
K. Takenoshita, R. Bernath, R. Kamptaprasad, J. Szilagyi, S. A. George, J. Cunado, M. Richardson, B. Fulford, I. Henderson, N. Hay, S. Ellwi
"Time-Multiplexed Solid-State Laser-driven EUV Sources for Beta-Tools and HVM"
International Symposium on Extreme Ultraviolet Lithography 2008, Lake Tahoe, California (2008).
2006
Jason Aspiotis, Robert Bernath, Christopher G. Brown, Martin C. Richardson
"Detection and analysis of RF emission generated by laser-matter interactions"
Proceedings of SPIE. SPIE Defense and Security Symposium , SPIE (Orlando, FL, USA), volume 6219, number 08, pages 1-8, May 2006
2006
Simi A. George, William T. Silfvast, Kazutoshi Takenoshita, Robert Bernath, Chiew-Seng Koay, Gregory Shimkaveg, Martin C. Richardson, Moza Mohammad Al-Rabban, H. Scott
"EUV Generation from Lithium Laser Plasma for Lithography"
Proceedings of SPIE, Advanced lithography, volume 6151
2006
Christopher G. Brown, Robert Bernath, Matthew Fisher, Martin C. Richardson, Michael Sigman, R.A. Walters, A Miziolek, H. Bereket, Lewis E. Johnson
"Remote Femtosecond Laser Induced Breakdown Spectroscopy (LIBS) in a Standoff Detection Regime"
Proceedings of SPIE. SPIE Defense and Security Symposium , SPIE (Orlando, FL, USA, 2006), volume 6219, pages B1-B7, May 2006
2006
Robert Bernath, Christopher G. Brown, Jason Aspiotis, Matthew Fisher, Martin C. Richardson
"Shock-wave generation in transparent media from ultra-fast lasers"
Proceedings of SPIE Defense and Security Symposium , SPIE (Orlando, FL, USA, 2006), volume 6219, pages A1-A5, May 2006
2005
Martin C. Richardson, Chiew-Seng Koay, Kazutoshi Takenoshita, Christian Keyser, Robert Bernath, Simi A. George, Somsak (Tony) Teerawattanasook
"Diagnostics for laser plasma EUV sources"
Proceedings of SPIE, volume 5580, pages 434-442
2005
Martin C. Richardson, Chiew-Seng Koay, Kazutoshi Takenoshita, Simi A. George, Robert Bernath, Moza Mohammad Al-Rabban
"Efficient 13.5 nm EUV generation from a laser plasma"
Quantum Electronics and Laser Science Conference (QELS), volume 3, pages 1947- 1949, May 2005.
2005
Martin Richardson, Chiew-Seng Koay, Simi George, Kazutoshi Takenoshita, Robert Bernath, Moza Al-Rabban, H. Scott, Vivek Bakshi
"EUV source parameters of the laser-produced tin-doped micro-plasma"
Proceedings of SPIE, Emerging Lithographic Technologies IX, SPIE (San Jose, CA, USA, 2005) volume 5751-91, 1-3 March
2005
Simi A. George, Chiew-Seng Koay, Kazutoshi Takenoshita, Robert Bernath, Moza Mohammad Al-Rabban, Christian Keyser, H. Scott, Martin C. Richardson
"EUV spectroscopy of mass-limited Sn-doped laser micro-plasmas"
Proceedings of SPIE, volume 5751
2005
Chiew-Seng Koay, Simi A. George, Kazutoshi Takenoshita, Robert Bernath, Etsuo Fujiwara, Martin C. Richardson
"High conversion efficiency microscopic tin-doped droplet target laser-plasma source for EUVL"
Proceedings of SPIE, volume 5751
2004
Peggy Gonzales, Robert Bernath, Joshua J. Duncan, Richard Ty Olmstead, Martin C. Richardson
"Femtosecond ablation scaling for different materials"
Proceedings of SPIE Euro Photonics, volume 5458, number 5458, pages 265-272
2003
Martin C. Richardson, Nikolai Vorobiev, Arnaud Zoubir, Robert Bernath, Richard Ty Olmstead, Joshua J. Duncan
"Burst mode high power femtosecond laser propagation through the atmosphere"
Proceedings of CLEO, 1-6 June 2003. Paper CThB4.
2003
Craig W. Siders, Martin C. Richardson, Nikolai Vorobiev, Richard Ty Olmstead, Robert Bernath, Tina Shih
"Burst-mode femtosecond ablation in Copper and Lexan"
Proceedings of CLEO, June 2003. Paper CFF3.
2002
Christian Keyser, Chiew-Seng Koay, Robert Bernath, Martin C. Richardson, I.C.E. Turcu, Harry Rieger, Mike F. Powers
"Liquid Droplet-Target Laser Plasma Sources for EUV Lithography"
Proceedings of CLEO, volume 1, page 441, 19-24 May 2002.
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