Giving to CREOL CREOL, The College of Optics & Photonics

Nanophotonics Systems Fabrication Facility

User Facility Operating Rules, Fees, & Equipment

The CREOL Nano-Fabrication facility is open to internal and external users. The facility contains a range of nanofabrication tools and related instrumentation, including an electron-beam lithography system (Leica EPBG 5000+), and various etching and deposition tools. Usage fees for internal (on-campus) users are specified below. External users should contact James Ross for more information. Industrial Affiliates are given priority external access.

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